Conference paper Open Access
Huang, Xiaoheng; Tahvili, Saeed; Kleijn, Emil; Docter, Boudewijn
We report on a semi-automated die-level test and measurement platform which has been designed to support several types of electro-optical measurements. The platform is optimized for repeatability, efficiency and minimal operator interference to enable an unattended collection of large amounts of data. It benefits from in-house developed control algorithms for automatic alignment of a lensed fiber to the optical facet, as well as progressive coordinates-based jogging between test structures.